--- title: AHCl with Low Water Content For Highest Quality | EF Gases description: Read more about how at EF Gases we produce Ultra-high Purity Anhydrous Hydrogen Chloride (AHCL) with low water content to ensure the highest quality. image: https://blog.efcgases.com/hubfs/Photos%202021/blue%20cylinders.png --- [![Electronic Fluorocarbons](https://blog.efcgases.com/hs-fs/hubfs/EFC_Final%20Logo%20REV_051221-01-4.png?width=1600&height=488&name=EFC_Final%20Logo%20REV_051221-01-4.png "Electronic Fluorocarbons")](https://www.efgases.com) Open main menu Close main menu - [About](https://efgases.com/about/) Open the submenu - [Our Team](https://efgases.com/team/) - [News](https://efgases.com/news/) - [Blog](https://efgases.com/blog/) - [Careers](https://efgases.com/careers/) - [Covid-19 Updates](https://efgases.com/covid-19-updates/) - [Products](https://efgases.com/products/) Open the submenu - [All Products](https://efgases.com/products/) - [By Industry](https://efgases.com/products/industries/) - [By Category](https://efgases.com/products/categories/) - [Cylinders and Valves](https://efgases.com/cylinders-valves/) - [Product Specifications](https://efgases.com/product-specifications/) - [Safety Data Sheets](https://efgases.com/safety-data-sheets/) - [Analytical Capabilities](https://efgases.com/about/analytical-capabilities/) - [Industry Applications](https://efgases.com/applications/) Open the submenu - [Semiconductor Industry](https://efgases.com/applications/semiconductor-industry/) - [Window Manufacturing](https://efgases.com/applications/window-manufacturing/) - [Electric and Switchgear](https://efgases.com/applications/electric-and-switchgear/) - [Aerospace](https://efgases.com/applications/aerospace/) - [Lighting Manufacturing](https://efgases.com/applications/lighting-manufacturing/) - [All](https://efgases.com/applications/) - [Services](https://efgases.com/recycling-recovery/) Open the submenu - [Recycling and Recovery](https://efgases.com/recycling-recovery/) - [Research and Development](https://efgases.com/research-development/) - [Shipping Services](https://efgases.com/shipping-services/) # AHCl with Low Water Content For Highest Quality | EF Gases ![Ravi Laxman, Ph.D.](https://blog.efcgases.com/hs-fs/hubfs/Ravi%20new%20newsletter%20pic%202022.jpg?width=45&name=Ravi%20new%20newsletter%20pic%202022.jpg) [Ravi Laxman, Ph.D.](https://blog.efcgases.com/author/ravi-laxman-ph-d) [Share this blog post on Twitter](https://twitter.com/intent/tweet?text=I+found+this+interesting+blog+post&url=https://blog.efcgases.com/ultra-high-purity-anhydrous-hydrogen-chloride-ahcl) [Share this blog post on Facebook](http://www.facebook.com/share.php?u=https://blog.efcgases.com/ultra-high-purity-anhydrous-hydrogen-chloride-ahcl) [Share this blog post on LinkedIn](http://www.linkedin.com/shareArticle?mini=true&url=https://blog.efcgases.com/ultra-high-purity-anhydrous-hydrogen-chloride-ahcl) ![](https://blog.efcgases.com/hubfs/Photos%202021/blue%20cylinders.png) # **Ultra-high Purity Anhydrous Hydrogen Chloride (AHCl)** Anhydrous Hydrogen Chloride (AHCl) is colorless, thermally stable, corrosive gas with an asphyxiating odor. AHCl has a melting point of -114.2℃ and a boiling point of -85℃, and its density is higher than air.  ## Uses of AHCl - Processes of Semiconductor Device Manufacturing - Chamber and Water Surface Cleaning - Cleaning reactors in Epitaxial Deposition - Dry Etching Reagent in Processes and Wet Bench Applications ## AHCl Water Content With an increasing demand for high-performance semiconductor devices, ultra-high-purity anhydrous Hydrogen Chloride (99.999% HCl) gas with low ppb trace metals and extremely low water content is most desirable. Water impurities in HCl directly affect the oxygen concentration at the Epi/Substrate interface. At lower deposition temperatures in an Epi process, there is a greater impact of H2O concentration with oxygen incorporation into the interfacial layers. Water impurities in HCl cause hazing and defects on wafer surfaces. Higher water impurity in AHCl leads to accelerated corrosion, formation of volatile trace metals, and particle contamination from delivery components such as regulators and MFCs.  In standard processes, AHCl is delivered as a liquified gas, water impurities separate by partition coefficients into the liquid phase (because of hydrogen bonding). This phenomenon initially lowers the concentration of H2O in the gas phase but continues to concentrate and change over the usage time of the cylinder. This results in low reliability. Multiple techniques are used to reduce H2O from the AHCl cylinder.  ## AHCl from EF Gases  At Electronic Fluorocarbons, we provide ultra-high purity AHCl with extremely low water content with various purification techniques; water inclusion is also prevented by the process we employ in cylinder baking, polishing or surface roughness treatments, passivation, and Ni plating (controls for H2O <1ppmv).   The demand for AHCl continues to increase significantly (2022-2027) due to the increase in device manufacturing across the world. Electronic Fluorocarbons LLC provides an alternative source of AHCl for the semiconductor industry with robust quality control and SQC.  ![Ravi Laxman, Ph.D.](https://blog.efcgases.com/hs-fs/hubfs/Ravi%20new%20newsletter%20pic%202022.jpg?width=150&name=Ravi%20new%20newsletter%20pic%202022.jpg) #### Ravi Laxman, Ph.D. Dr. Ravi Laxman joined Electronic Fluorocarbons in 2019 as a consultant for Strategic Advanced Materials. He brings an expertise in chemistry and materials processing within electronic premium products and new applications. He supports the development of new products within EFC’s portfolio, while driving investments and strategic alliances with key customers and vendors. His career has focused identifying applications and products with growth potential within semiconductor and emerging markets. He has worked closely with quality, production, and R&D teams to develop collaboration with OEMS and end users. Ravi joined EFC from Linde Engineering North America, where he was responsible for strategy and revenue growth as Product and Business Manager, Electronics and Premium Products. Ravi earned a MS in Chemistry from Indian Institute of Technology, Roorkee, and holds a Ph.D. in Chemistry from the University of Missouri-Saint Louis. ## Leave a Comment ## Related Articles [![](https://blog.efcgases.com/hubfs/shutterstock_1656251128%20(1).jpg)](https://blog.efcgases.com/semiconductors-fabrication-high-purity-gases-1) [Semiconductor](https://blog.efcgases.com/tag/semiconductor) ### [Semiconductors: Fabrication & High Purity Gases](https://blog.efcgases.com/semiconductors-fabrication-high-purity-gases-1) We have historically provided to our customers our legacy products with the highest level of purity and quality coupled with state-of-the-art analytical... ![Electronic Fluorocarbons](https://blog.efcgases.com/hs-fs/hubfs/EFC_Final%20Logo%20REV_051221%20-%20Copy_Page_07.jpg?width=45&name=EFC_Final%20Logo%20REV_051221%20-%20Copy_Page_07.jpg) [Electronic Fluorocarbons](https://blog.efcgases.com/author/electronic-fluorocarbons) [Read More](https://blog.efcgases.com/semiconductors-fabrication-high-purity-gases-1) [![Monitoring Supply Chain](https://efgases.com/app/uploads/2021/08/iStock_000041542770_Full-scaled.jpg)](https://blog.efcgases.com/monitoring-the-potential-geopolitical-impact-on-the-supply-chain) [Supply Chain](https://blog.efcgases.com/tag/supply-chain) ### [Gas Supply Chain Remains In Tact Despite Global Unrest](https://blog.efcgases.com/monitoring-the-potential-geopolitical-impact-on-the-supply-chain) Russia’s invasion of Ukraine has caused many far-reaching geopolitical repercussions. Our thoughts and prayers are with those that are impacted by the aggressive... ![Electronic Fluorocarbons](https://blog.efcgases.com/hs-fs/hubfs/EFC_Final%20Logo%20REV_051221%20-%20Copy_Page_07.jpg?width=45&name=EFC_Final%20Logo%20REV_051221%20-%20Copy_Page_07.jpg) [Electronic Fluorocarbons](https://blog.efcgases.com/author/electronic-fluorocarbons) [Read More](https://blog.efcgases.com/monitoring-the-potential-geopolitical-impact-on-the-supply-chain) #### About - [Our Team](https://efgases.com/team/) - [News](https://efgases.com/news/) - [Careers](https://efgases.com/careers/) #### Industry Applications - [Semiconductor Industry](https://efgases.com/applications/semiconductor-industry/) - [Window Manufacturing](https://efgases.com/applications/window-manufacturing/) - [Electric and Switchgear](https://efgases.com/applications/electric-and-switchgear/) - [Aerospace](https://efgases.com/applications/aerospace/) - [Lighting Manufacturing](https://efgases.com/applications/lighting-manufacturing/) #### Services - [Recycling and Recovery](https://efgases.com/recycling-recovery/) - [Research and Development](https://efgases.com/research-development/) - [Shipping Services](https://efgases.com/shipping-services/) [Contact Us](mailto:sales@efgases.com) [Follow us on Facebook](https://www.facebook.com/ElectronicFluorocarbons?ref=hl) [Follow us on LinkedIn](https://www.linkedin.com/company/electronic-fluorocarbons-llc/?trk=biz-companies-cym) [Follow us on Twitter](https://twitter.com/efgases) [Follow us on Instagram](https://www.instagram.com/efgases/)